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Manufacturer: Spts Part number: SPTS MPX ICP PRO SR Description: Spts Mpx Icp Sr Etcher Consisting Of: - Model: Mpx Pro Icp- Chamber: Ase (advanced Silicon Etch)- Process: Drie (deep Silicon Etch) - Single Process . Product Category: Semiconductor, Sub Category: Etchers/ashers

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Manufacturer: Spts Part number: SPTS MPX ICP PRO SR Description: Spts Mpx Icp Sr Etcher Consisting Of: - Model: Mpx Pro Icp- Chamber: Ase (advanced Silicon Etch)- Process: Drie (deep Silicon Etch) - Single Process . Product Category: Semiconductor, Sub Category: Etchers/ashers